Wafer scrubbing device
USRE36767E · kind E · reissue
5Cited by
20References
32Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 23, 1999 |
| Grant date | Jul 11, 2000 |
| Priority date | — |
| Expiry date | Feb 23, 2019 |
Classification
- Technology area (CPC —)General
Abstract
A wafer scrubbing device for cleaning the surfaces of a thin disk disposed on a stationary spin chuck employs a double brush arrangement whereby brush rotation induces rotation of the disk to be cleaned and whereby the speed differential between the constant rotational speed of the brushes and the .[.variable.]. rotational speed of the disk due to the relative position of the brushes on the disk causes the scrubbing of both surfaces and the edge of the disk.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.