Radiation source, lithographic apparatus, device manufacturing method, and device manufactured thereby
USRE41362E1 · kind E1 · reissue
2Cited by
5References
67Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 16, 2006 |
| Grant date | Jun 1, 2010 |
| Priority date | — |
| Expiry date | Nov 16, 2026 |
Classification
- Technology area (CPC —)General
Abstract
A radiation source includes an anode and a cathode for creating a discharge in a vapor in a space between anode and cathode and to form a plasma of a working vapor so as to generate electromagnetic radiation. The cathode defines a hollow cavity in communication with the discharge region through an aperture that has a substantially annular configuration around a central axis of said radiation source so as to initiate said discharge. A driver vapor is supplied to the cathode cavity and the working vapor is supplied in a region around the central axis in between anode and cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.