System method and apparatus for selecting and controlling light source bandwidth

USRE45249E1 · kind E1 · reissue

Assignee

• Cymer, LLC · US

Inventors

• Efrain Figueroa · San Diego, US
• William N. Partlo · Poway, US
• John M. Algots · San Diego, US

Key dates

• Filing date: Feb 26, 2013
• Grant date: Nov 18, 2014
• Expiry date: Feb 26, 2033

Classification

• Technology area (CPC —): General

Abstract

The bandwidth selection mechanism includes a first actuator mounted on a second face of a dispersive optical element, the second face being opposite from a reflective face, the first actuator having a first end coupled to a first end block and a second end coupled to a second end block, the first actuator being operative to apply equal and opposite forces to the first end block and the second end block to bend the body of the dispersive optical element along the longitudinal axis of the body and in a first direction normal to the reflective face of the dispersive optical element. The bandwidth selection mechanism also includes a second actuator being operative to apply equal and opposite forces to bend the body along the longitudinal axis of the body, in a second direction perpendicular to the reflective face of the dispersive optical element.