Active Layer Parametrics, Inc.
4Patents
4Active
4Granted
51Portfolio score
Filing activity: Apr 25, 2017 → Apr 21, 2023
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11699622B2 | Methods and apparatus for test pattern forming and film property measurement | Electricity | 1 | Active |
| US11289386B2 | Methods and apparatus for test pattern forming and film property measurement | Electricity | 0 | Active |
| US12313669B2 | Methods and tools for electrical property depth profiling using electro-etching | Physics | 0 | Active |
| US10790203B2 | Methods and systems for material property profiling of thin films | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.