Patent assignee · US · COMPANY

Aplex, Inc.

19Patents
0Active
19Granted
33Portfolio score

Filing activity: Oct 29, 1985 → Nov 6, 1998

Most-cited patents

PatentTitleAreaCited byStatus
US6059643A Apparatus and method for polishing a flat surface using a belted polishing pad Physics 264 Expired
US6000997A Temperature regulation in a CMP process Performing Operations; Transporting 56 Expired
US5934974A In-situ monitoring of polishing pad wear Electricity 53 Expired
US4681573A Feminine urinary device Human Necessities 53 Expired
US5980368A Polishing tool having a sealed fluid chamber for support of polishing pad Performing Operations; Transporting 40 Expired
US5947802A Wafer shuttle system Performing Operations; Transporting 27 Expired
US6062959A Polishing system including a hydrostatic fluid bearing support Electricity 26 Expired
US6042457A Conditioner assembly for a chemical mechanical polishing apparatus Performing Operations; Transporting 19 Expired
US6080040A Wafer carrier head with inflatable bladder and attack angle control for polishing Performing Operations; Transporting 18 Expired
US6126512A Robust belt tracking and control system for hostile environment Performing Operations; Transporting 18 Expired
USD302042S Feminine urinary conduit General 17 Expired
US6126527A Seal for polishing belt center support having a single movable sealed cavity Performing Operations; Transporting 16 Expired
US5957764A Modular wafer polishing apparatus and method Performing Operations; Transporting 14 Expired
US6086456A Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow Electricity 12 Expired
US6149512A Linear pad conditioning apparatus Emerging Cross-Sectional Technologies 9 Expired
US6159083A Polishing head for a chemical mechanical polishing apparatus Emerging Cross-Sectional Technologies 7 Expired
US6146249A Apparatus and method for polishing a flat surface using a belted polishing pad Physics 3 Expired
US6098901A Apparatus for dispensing slurry Electricity 3 Expired
US6062961A Wafer polishing head drive Performing Operations; Transporting 1 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.