Aplex, Inc.
19Patents
0Active
19Granted
33Portfolio score
Filing activity: Oct 29, 1985 → Nov 6, 1998
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6059643A | Apparatus and method for polishing a flat surface using a belted polishing pad | Physics | 264 | Expired |
| US6000997A | Temperature regulation in a CMP process | Performing Operations; Transporting | 56 | Expired |
| US5934974A | In-situ monitoring of polishing pad wear | Electricity | 53 | Expired |
| US4681573A | Feminine urinary device | Human Necessities | 53 | Expired |
| US5980368A | Polishing tool having a sealed fluid chamber for support of polishing pad | Performing Operations; Transporting | 40 | Expired |
| US5947802A | Wafer shuttle system | Performing Operations; Transporting | 27 | Expired |
| US6062959A | Polishing system including a hydrostatic fluid bearing support | Electricity | 26 | Expired |
| US6042457A | Conditioner assembly for a chemical mechanical polishing apparatus | Performing Operations; Transporting | 19 | Expired |
| US6080040A | Wafer carrier head with inflatable bladder and attack angle control for polishing | Performing Operations; Transporting | 18 | Expired |
| US6126512A | Robust belt tracking and control system for hostile environment | Performing Operations; Transporting | 18 | Expired |
| USD302042S | Feminine urinary conduit | General | 17 | Expired |
| US6126527A | Seal for polishing belt center support having a single movable sealed cavity | Performing Operations; Transporting | 16 | Expired |
| US5957764A | Modular wafer polishing apparatus and method | Performing Operations; Transporting | 14 | Expired |
| US6086456A | Polishing method using a hydrostatic fluid bearing support having fluctuating fluid flow | Electricity | 12 | Expired |
| US6149512A | Linear pad conditioning apparatus | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6159083A | Polishing head for a chemical mechanical polishing apparatus | Emerging Cross-Sectional Technologies | 7 | Expired |
| US6146249A | Apparatus and method for polishing a flat surface using a belted polishing pad | Physics | 3 | Expired |
| US6098901A | Apparatus for dispensing slurry | Electricity | 3 | Expired |
| US6062961A | Wafer polishing head drive | Performing Operations; Transporting | 1 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.