Patent assignee · US · COMPANY

Appiled Materials, Inc.

4Patents
1Active
4Granted
32Portfolio score

Filing activity: Mar 10, 2000 → Oct 7, 2005 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US6517414B1 Method and apparatus for controlling a pad conditioning process of a chemical-mechanical polishing apparatus Performing Operations; Transporting 55 Expired
US6676760B2 Process chamber having multiple gas distributors and method Chemistry; Metallurgy 20 Expired
US7464917B2 Ampoule splash guard apparatus Emerging Cross-Sectional Technologies 16 Active
US7430104B2 Electrostatic chuck for wafer metrology and inspection equipment Emerging Cross-Sectional Technologies 5 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.