Elith LLC
5Patents
0Active
5Granted
26Portfolio score
Filing activity: May 30, 2000 → Apr 28, 2003
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6333508A | Illumination system for electron beam lithography tool | Electricity | 52 | Expired |
| US6528799B1 | Device and method for suppressing space charge induced aberrations in charged-particle projection lithography systems | Emerging Cross-Sectional Technologies | 7 | Expired |
| US7050957B2 | Projection electron beam lithography apparatus and method employing an estimator | Electricity | 2 | Expired |
| US6706609B2 | Method of forming an alignment feature in or on a multi-layered semiconductor structure | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7102732B2 | Method of manufacturing a device by employing a lithographic apparatus including a sliding electron-optical element | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.