Patent · US Expired

Device for transferring a transport object between two end positions

US5636724A · kind A · utility

4Cited by

7References

16Claims

0Family size

Assignee

Jenoptik Technologie GmbH · DE

Inventors

Werner Scheler · Jena, DE
Juergen Graefe · Jena, DE
Andreas Mages · Jena, DE
Andreas Birkner · Jena, DE
Erich Adler · Jena, DE

Key dates

Filing date	Mar 1, 1995
Grant date	Jun 10, 1997
Priority date	—
Expiry date	Mar 1, 2015

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S414/14
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

The object of a device for transferring a transport object between two end positions is to exclude negative influences on dependability and clean room conditions, also in lengthy transport paths, while ensuring a highly flexible transfer. To control the operation of sensors and actuators at a movable part of a drive serving to transfer, electrical contact between these sensors and actuators and a supply unit located in a stationary part of the drive is effected exclusively in the two end positions. The device is provided in particular for use in the manufacture of semiconductors, e.g., for charging semiconductor processing machines, but is not limited to this field.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.