Patent assignee · JP · COMPANY

NGR INC.

12Patents
11Active
12Granted
46Portfolio score

Filing activity: May 23, 2003 → Jun 28, 2018 · 3 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US8045785B2 Pattern inspection apparatus and method Electricity 23 Active
US8422761B2 Defect and critical dimension analysis systems and methods for a semiconductor lithographic process Physics 10 Active
US8150140B2 System and method for a semiconductor lithographic process control using statistical information in defect identification Physics 9 Active
US8285031B2 Pattern inspection apparatus and method Physics 7 Active
US7983471B2 Pattern inspection apparatus and method Physics 4 Active
US9189843B2 Pattern inspection apparatus and method Physics 4 Active
US6925705B2 Cage making apparatus Emerging Cross-Sectional Technologies 3 Expired
US10446365B2 Method of verifying operation parameter of scanning electron microscope Electricity 1 Active
US10515779B2 Imaging system and imaging method Electricity 0 Active
US10354375B2 Method of utilizing information on shape of frequency distribution of inspection result in a pattern inspection apparatus Physics 0 Active
US10515778B2 Secondary particle detection system of scanning electron microscope Electricity 0 Active
US9793091B1 Image generation apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.