Semitherm
3Patents
0Active
3Granted
29Portfolio score
Filing activity: May 14, 1987 → Oct 13, 1994
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4738618A | Vertical thermal processor | Emerging Cross-Sectional Technologies | 352 | Expired |
| US5000682A | Vertical thermal processor for semiconductor wafers | Mechanical Engineering; Lighting; Heating | 35 | Expired |
| US5590996A | Wafer transfer apparatus | Emerging Cross-Sectional Technologies | 15 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.