Patent assignee · KR · COMPANY

UBmaterials Inc.

5Patents
5Active
5Granted
44Portfolio score

Filing activity: Oct 20, 2014 → Nov 18, 2016

Most-cited patents

PatentTitleAreaCited byStatus
US9982165B2 Polishing slurry for silicon, method of polishing polysilicon and method of manufacturing a thin film transistor substrate Electricity 2 Active
US9567490B2 Polishing slurry and substrate polishing method using the same Electricity 2 Active
US9834705B2 Polishing slurry and method of polishing substrate using the same Electricity 1 Active
US9790401B2 Abrasive particles, polishing slurry and method of fabricating abrasive particles Chemistry; Metallurgy 0 Active
US9758698B2 Polishing slurry and substrate polishing method using the same Electricity 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.