YieldUP International
🏢 View company profile →14Patents
0Active
14Granted
32Portfolio score
Filing activity: Aug 3, 1994 → Sep 24, 1998
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5571337A | Method for cleaning and drying a semiconductor wafer | Emerging Cross-Sectional Technologies | 92 | Expired |
| US5634978A | Ultra-low particle semiconductor method | Electricity | 42 | Expired |
| US5542441A | Apparatus for delivering ultra-low particle counts in semiconductor manufacturing | Emerging Cross-Sectional Technologies | 32 | Expired |
| US5772784A | Ultra-low particle semiconductor cleaner | Emerging Cross-Sectional Technologies | 31 | Expired |
| US5849104A | Method and apparatus for cleaning wafers using multiple tanks | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5958146A | Ultra-low particle semiconductor cleaner using heated fluids | Emerging Cross-Sectional Technologies | 23 | Expired |
| US5685327A | Ultra-low particle semiconductor apparatus | Emerging Cross-Sectional Technologies | 20 | Expired |
| US5873947A | Ultra-low particle disk cleaner | Emerging Cross-Sectional Technologies | 19 | Expired |
| US5932027A | Cleaning and drying photoresist coated wafers | Emerging Cross-Sectional Technologies | 18 | Expired |
| US5651379A | Method and apparatus for delivering ultra-low particle counts in semiconductor manufacturing | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5878760A | Ultra-low particle semiconductor cleaner | Emerging Cross-Sectional Technologies | 15 | Expired |
| US5891256A | Ultra-low particle semiconductor cleaner | Emerging Cross-Sectional Technologies | 13 | Expired |
| US5988189A | Method and apparatus for cleaning wafers using multiple tanks | Emerging Cross-Sectional Technologies | 12 | Expired |
| US5868150A | Ultra-low particle semiconductor cleaner | Emerging Cross-Sectional Technologies | 11 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.