Alain Charles
3Patents
2h-index
4Co-inventors
30Inventor score
Filing activity: Dec 4, 2000 → Oct 15, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6902986B2 | Method for defining alignment marks in a semiconductor wafer | Physics | 6 | Expired |
| US6895294B2 | Assembly comprising a plurality of mask containers, manufacturing system for manufacturing semiconductor devices, and method | Physics | 5 | Expired |
| US6817602B2 | Manufacturing system method for processing a lithography mask container | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.