Assembly comprising a plurality of mask containers, manufacturing system for manufacturing semiconductor devices, and method
US6895294B2 · kind B2 · utility
Assignees
Inventors
Key dates
| Filing date | Dec 4, 2000 |
| Grant date | May 17, 2005 |
| Priority date | — |
| Expiry date | Nov 28, 2022 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/70741
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention relates to a system for the manufacture of semiconductor devices by lithography, and in particular to an assembly of mask containers for use in such a system. The system comprises: a plurality of mask containers adapted to engage with one another such that two or more containers can be carried together as a stack; a plurality of lithography bays; a transport rail system for carrying the containers between different lithography bays. Each lithography bay has a transmitter/receiver unit for communicating lithography data with a tracking device located in each container, allowing for more efficient mask management. The transportation of the containers in stacks results in an improvement in efficiency.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.