Alan Tso
8Patents
2h-index
22Co-inventors
47Inventor score
Filing activity: Nov 30, 2009 → Feb 13, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9714465B2 | Gas distribution blocker apparatus | Emerging Cross-Sectional Technologies | 4 | Active |
| US10903054B2 | Multi-zone gas distribution systems and methods | Electricity | 3 | Active |
| US11581165B2 | Multi-zone gas distribution systems and methods | Electricity | 1 | Active |
| US8728918B2 | Method and apparatus for fabricating silicon heterojunction solar cells | Emerging Cross-Sectional Technologies | 1 | Active |
| US11637002B2 | Methods and systems to enhance process uniformity | Electricity | 1 | Active |
| US12148597B2 | Multi-zone gas distribution systems and methods | Electricity | 0 | Active |
| US11239061B2 | Methods and systems to enhance process uniformity | Electricity | 0 | Active |
| US11609505B2 | Apparatus and methods for verification and re-use of process fluids | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.