Apparatus and methods for verification and re-use of process fluids

US11609505B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Mangesh Ashok BANGAR · San Jose, US
• Gautam Pisharody · Newark, US
• Lancelot HUANG · San Jose, US
• Alan Tso · San Jose, US
• Douglas A. Buchberger, Jr. · Livermore, US
• Huixiong Dai · San Jose, US
• Dmitry Lubomirsky · Cupertino, US
• Srinivas D. Nemani · Sunnyvale, US
• Christopher S. Ngai · Burlingame, US

Key dates

• Filing date: Apr 5, 2021
• Grant date: Mar 21, 2023
• Expiry date: Jun 5, 2041

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/10
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

Embodiments of the present disclosure generally relate to apparatus and methods for verification and re-use of process fluids. The apparatus generally includes a tool for performing lithography, and a recirculation path coupled to the tool. The recirculation path generally includes a collection unit coupled at first end to a first end of the tool, and a probe coupled at a first end to a second end of the collection unit, the probe for determining one or more characteristics of a fluid flowing from the tool. The recirculation path of the apparatus further generally includes a purification unit coupled at a first end to a third end of the collection unit, the purification unit further coupled at a second end to a second end of the probe, the purification unit for changing a characteristic of the fluid.