Inventor · Santa Clara, CA, US

Alex Kabansky

7Patents
5h-index
8Co-inventors
52Inventor score

Filing activity: Apr 5, 2000 → Jul 15, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US6461972B1 Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow Electricity 35 Expired
US6346490B1 Process for treating damaged surfaces of low k carbon doped silicon oxide dielectric material after plasma etching and plasma cleaning steps Electricity 29 Expired
US6641698B2 Integrated circuit fabrication dual plasma process with separate introduction of different gases into gas flow Electricity 18 Expired
US6346488B1 Process to provide enhanced resistance to cracking and to further reduce the dielectric constant of a low dielectric constant dielectric film of an integrated circuit structure by implantation with hydrogen ions Electricity 18 Expired
US7351663B1 Removing whisker defects Electricity 7 Expired
US7997288B2 Single phase proximity head having a controlled meniscus for treating a substrate Emerging Cross-Sectional Technologies 4 Active
US8313580B2 Method for processing a substrate using a single phase proximity head having a controlled meniscus Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.