Allen Lau
14Patents
9h-index
20Co-inventors
68Inventor score
Filing activity: Aug 9, 2001 → Nov 27, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7480129B2 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Emerging Cross-Sectional Technologies | 66 | Expired |
| US6726805B2 | Pedestal with integral shield | Electricity | 36 | Expired |
| US6652713B2 | Pedestal with integral shield | Electricity | 31 | Expired |
| US6837968B2 | Lower pedestal shield | Electricity | 27 | Expired |
| US7697260B2 | Detachable electrostatic chuck | Emerging Cross-Sectional Technologies | 27 | Expired |
| US7252737B2 | Pedestal with integral shield | Electricity | 18 | Expired |
| US6669829B2 | Shutter disk and blade alignment sensor | Chemistry; Metallurgy | 11 | Expired |
| US7148435B2 | Build-in LOTO device on equipment breaker panel | Electricity | 10 | Expired |
| US7907384B2 | Detachable electrostatic chuck for supporting a substrate in a process chamber | Emerging Cross-Sectional Technologies | 9 | Active |
| US6827825B2 | Method for detecting the position of a shutter disk in a physical vapor deposition chamber | Chemistry; Metallurgy | 7 | Expired |
| US10883174B2 | Gas diffuser mounting plate for reduced particle generation | Electricity | 1 | Active |
| US9822449B2 | Showerhead support structures | Electricity | 0 | Active |
| US10923327B2 | Chamber liner | Electricity | 0 | Active |
| US10927461B2 | Gas diffuser support structure for reduced particle generation | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.