Showerhead support structures
US9822449B2 · kind B2 · utility
0Cited by
3References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 28, 2016 |
| Grant date | Nov 21, 2017 |
| Priority date | — |
| Expiry date | Aug 28, 2036 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/32807
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Embodiments of the present disclosure generally provide apparatus and methods for supporting a gas distribution showerhead in a processing chamber. In one embodiment, a gas distribution showerhead for a vacuum chamber includes a rectangular body having four sides, a first major surface and a second major surface opposite the first major surface, and a plurality of gas passages formed through the body in a longitudinal direction between the first and second major surfaces, a center support member coupled to the body in a center region thereof, and a mid-support member coupled to the body between the center region and the side.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.