Andrew V. LE
10Patents
3h-index
15Co-inventors
53Inventor score
Filing activity: Jan 7, 2002 → Jun 27, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6764265B2 | Erosion resistant slit valve | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7789810B2 | Training tool for martial arts | Human Necessities | 13 | Active |
| US10330612B2 | Multi-function x-ray metrology tool for production inspection/monitoring of thin films and multidimensional structures | Electricity | 4 | Active |
| US10002745B2 | Plasma treatment process for in-situ chamber cleaning efficiency enhancement in plasma processing chamber | Electricity | 1 | Active |
| US10208380B2 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Electricity | 1 | Active |
| US7983776B2 | System and method for matching silicon oxide thickness between similar process tools | Electricity | 1 | Active |
| US10883932B2 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Physics | 0 | Active |
| US10365216B2 | Advanced in-situ particle detection system for semiconductor substrate processing systems | Physics | 0 | Active |
| US10580626B2 | Arcing detection apparatus for plasma processing | Electricity | 0 | Active |
| US10655223B2 | Advanced coating method and materials to prevent HDP-CVD chamber arcing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.