Arun Ananth Aiyer
15Patents
6h-index
8Co-inventors
59Inventor score
Filing activity: Feb 1, 1995 → Sep 24, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5859698A | Method and apparatus for macro defect detection using scattered light | Physics | 86 | Expired |
| US7339682B2 | Heterodyne reflectometer for film thickness monitoring and method for implementing | Physics | 43 | Expired |
| US5777729A | Wafer inspection method and apparatus using diffracted light | Physics | 41 | Expired |
| US5838448A | CMP variable angle in situ sensor | Physics | 38 | Expired |
| US6768543B1 | Wafer inspection apparatus with unique illumination methodology and method of operation | Physics | 19 | Expired |
| US6988060B1 | Alignment simulation | Physics | 7 | Expired |
| US7368206B2 | Automated overlay metrology system | Electricity | 5 | Expired |
| US7589843B2 | Self referencing heterodyne reflectometer and method for implementing | Physics | 5 | Active |
| US5648848A | Beam delivery apparatus and method for interferometry using rotatable polarization chucks | Physics | 5 | Expired |
| US7084979B1 | Non-contact optical profilometer with orthogonal beams | Physics | 4 | Expired |
| US7545503B2 | Self referencing heterodyne reflectometer and method for implementing | Physics | 4 | Expired |
| US10584372B1 | Sensor device and method for label-free detection of double strand nucleotides | Physics | 3 | Active |
| US9316490B2 | Method and system for measuring patterned substrates | Physics | 1 | Active |
| US11141087B2 | Optical device for non-invasive continuous monitoring of blood glucose level and HbA1c concentration | Human Necessities | 1 | Active |
| US11452469B1 | Optical device for non-invasive continuous monitoring of blood glucose level and HbA1c concentration | Human Necessities | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.