Benjamin Petro
8Patents
1h-index
19Co-inventors
40Inventor score
Filing activity: Oct 21, 2015 → Mar 30, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10418248B2 | Method of polishing group III-V materials | Electricity | 3 | Active |
| US10124464B2 | Corrosion inhibitors and related compositions and methods | Electricity | 1 | Active |
| US9688885B2 | Cobalt polishing accelerators | Electricity | 1 | Active |
| US9834704B2 | Cobalt dishing control agents | Electricity | 1 | Active |
| US9944828B2 | Slurry for chemical mechanical polishing of cobalt | Electricity | 0 | Active |
| US12269969B2 | Polishing composition and method with high selectivity for silicon nitride and polysilicon over silicon oxide | Electricity | 0 | Active |
| US9850403B2 | Cobalt polishing accelerators | Electricity | 0 | Active |
| US11725116B2 | CMP composition including a novel abrasive | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.