Brian Severson
13Patents
6h-index
23Co-inventors
66Inventor score
Filing activity: Dec 8, 1998 → May 11, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7402098B2 | Carrier head for workpiece planarization/polishing | Performing Operations; Transporting | 25 | Active |
| US8371567B2 | Pedestal covers | Electricity | 23 | Active |
| US8851463B2 | Pedestal covers | Electricity | 17 | Active |
| USD415870S | Pet casket | General | 13 | Expired |
| US7632170B2 | CMP apparatuses with polishing assemblies that provide for the passive removal of slurry | Performing Operations; Transporting | 7 | Active |
| US7229339B2 | CMP apparatus and method | Performing Operations; Transporting | 7 | Expired |
| US7243891B2 | Mounting bracket, and method therefor | Mechanical Engineering; Lighting; Heating | 4 | Expired |
| US10651015B2 | Variable depth edge ring for etch uniformity control | Electricity | 4 | Active |
| USD671901S1 | Pedestal cover | General | 3 | Active |
| US7335092B1 | Carrier head for workpiece planarization/polishing | Performing Operations; Transporting | 2 | Active |
| US10438833B2 | Wafer lift ring system for wafer transfer | Electricity | 1 | Active |
| US6964505B2 | Easily assembled lamp assembling device | Mechanical Engineering; Lighting; Heating | 0 | Expired |
| US11342163B2 | Variable depth edge ring for etch uniformity control | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.