Inventor · Hersbruck, DE

Christoph Friedrich

5Patents
4h-index
16Co-inventors
43Inventor score

Filing activity: Oct 29, 1999 → May 30, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6631511B2 Generating mask layout data for simulation of lithographic processes Physics 40 Expired
US6686098B2 Lithography method and lithography mask Physics 9 Expired
US6660437B2 Alternating phase mask Physics 8 Expired
US6466373B1 Trimming mask with semitransparent phase-shifting regions Physics 5 Expired
US6635388B1 Contact hole fabrication with the aid of mutually crossing sudden phase shift edges of a single phase shift mask Physics 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.