Christopher E. Barns
8Patents
7h-index
17Co-inventors
60Inventor score
Filing activity: Apr 23, 1979 → Mar 15, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6106662A | Method and apparatus for endpoint detection for chemical mechanical polishing | Performing Operations; Transporting | 130 | Expired |
| US5547417A | Method and apparatus for conditioning a semiconductor polishing pad | Performing Operations; Transporting | 123 | Expired |
| US5635083A | Method and apparatus for chemical-mechanical polishing using pneumatic pressure applied to the backside of a substrate | Electricity | 109 | Expired |
| US5554064A | Orbital motion chemical-mechanical polishing apparatus and method of fabrication | Performing Operations; Transporting | 101 | Expired |
| US6095904A | Orbital motion chemical-mechanical polishing method and apparatus | Performing Operations; Transporting | 12 | Expired |
| US4271761A | High acceleration cable deployment system | Mechanical Engineering; Lighting; Heating | 12 | Expired |
| US6083089A | Method and apparatus for chemical mechanical polishing | Electricity | 7 | Expired |
| US9190796B2 | Apparatus for precision insertion | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.