Curtis Bailey
14Patents
5h-index
42Co-inventors
62Inventor score
Filing activity: Sep 28, 2010 → Sep 7, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10760158B2 | Ex situ coating of chamber components for semiconductor processing | Electricity | 12 | Active |
| US10851457B2 | PECVD deposition system for deposition on selective side of the substrate | Electricity | 12 | Active |
| US10354857B2 | High power low pressure UV bulb with plasma resistant coating | Human Necessities | 6 | Active |
| US11365479B2 | Ex situ coating of chamber components for semiconductor processing | Electricity | 5 | Active |
| US11441222B2 | PECVD deposition system for deposition on selective side of the substrate | Electricity | 5 | Active |
| US8628618B2 | Precursor vapor generation and delivery system with filters and filter monitoring system | Emerging Cross-Sectional Technologies | 3 | Active |
| US10872747B2 | Controlling showerhead heating via resistive thermal measurements | Electricity | 3 | Active |
| US11725283B2 | PECVD deposition system for deposition on selective side of the substrate | Electricity | 3 | Active |
| US11512393B2 | Dynamic sheath control with edge ring lift | Electricity | 2 | Active |
| US11851760B2 | PECVD deposition system for deposition on selective side of the substrate | Electricity | 1 | Active |
| US12227837B2 | Ex situ coating of chamber components for semiconductor processing | Electricity | 1 | Active |
| US10240236B2 | Clean resistant windows for ultraviolet thermal processing | Performing Operations; Transporting | 0 | Active |
| US9637821B2 | Method for supplying vaporized precursor | Emerging Cross-Sectional Technologies | 0 | Active |
| US12163219B2 | Ex situ coating of chamber components for semiconductor processing | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.