Controlling showerhead heating via resistive thermal measurements
US10872747B2 · kind B2 · utility
3Cited by
9References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 8, 2018 |
| Grant date | Dec 22, 2020 |
| Priority date | — |
| Expiry date | Mar 12, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/6833
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A showerhead for a plasma chamber comprises a resistive heater configured to receive power to heat the showerhead of the plasma chamber, and a resistive element thermally bonded to the showerhead of the plasma chamber. The resistive element changes resistance in response to a change in temperature of the showerhead. The resistive element is encapsulated in an insulating material to electrically insulate the resistive element from the showerhead. The insulating material is a good conductor of heat. The power to the resistive heater is received based on the resistance of the resistive element.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.