Dan Wack
38Patents
25h-index
27Co-inventors
81Inventor score
Filing activity: Jun 27, 2001 → Mar 13, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6633831B2 | Methods and systems for determining a critical dimension and a thin film characteristic of a specimen | Emerging Cross-Sectional Technologies | 246 | Expired |
| US8179530B2 | Methods and systems for determining a critical dimension and overlay of a specimen | Electricity | 127 | Active |
| US6694284B1 | Methods and systems for determining at least four properties of a specimen | Electricity | 120 | Expired |
| US6891627B1 | Methods and systems for determining a critical dimension and overlay of a specimen | Electricity | 117 | Expired |
| US6673637B2 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Electricity | 71 | Expired |
| US6919957B2 | Methods and systems for determining a critical dimension, a presence of defects, and a thin film characteristic of a specimen | Electricity | 66 | Expired |
| US6829559B2 | Methods and systems for determining a presence of macro and micro defects on a specimen | Emerging Cross-Sectional Technologies | 56 | Expired |
| US7068833B1 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Emerging Cross-Sectional Technologies | 49 | Expired |
| US7317531B2 | Apparatus and methods for detecting overlay errors using scatterometry | Physics | 49 | Expired |
| US6782337B2 | Methods and systems for determining a critical dimension an a presence of defects on a specimen | Electricity | 47 | Expired |
| US7139083B2 | Methods and systems for determining a composition and a thickness of a specimen | Emerging Cross-Sectional Technologies | 47 | Expired |
| US7751046B2 | Methods and systems for determining a critical dimension and overlay of a specimen | Electricity | 45 | Expired |
| US6812045B1 | Methods and systems for determining a characteristic of a specimen prior to, during, or subsequent to ion implantation | Electricity | 45 | Expired |
| US7106425B1 | Methods and systems for determining a presence of defects and a thin film characteristic of a specimen | Physics | 39 | Expired |
| US7196782B2 | Methods and systems for determining a thin film characteristic and an electrical property of a specimen | Emerging Cross-Sectional Technologies | 39 | Expired |
| US6806951B2 | Methods and systems for determining at least one characteristic of defects on at least two sides of a specimen | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6917433B2 | Methods and systems for determining a property of a specimen prior to, during, or subsequent to an etch process | Emerging Cross-Sectional Technologies | 35 | Expired |
| US6917419B2 | Methods and systems for determining flatness, a presence of defects, and a thin film characteristic of a specimen | Emerging Cross-Sectional Technologies | 31 | Expired |
| US6950196B2 | Methods and systems for determining a thickness of a structure on a specimen and at least one additional property of the specimen | Emerging Cross-Sectional Technologies | 31 | Expired |
| US7006235B2 | Methods and systems for determining overlay and flatness of a specimen | Emerging Cross-Sectional Technologies | 30 | Expired |
| US8330281B2 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Emerging Cross-Sectional Technologies | 30 | Active |
| US7181057B2 | Overlay marks, methods of overlay mark design and methods of overlay measurements | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6891610B2 | Methods and systems for determining an implant characteristic and a presence of defects on a specimen | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6818459B2 | Methods and systems for determining a presence of macro defects and overlay of a specimen | Electricity | 28 | Expired |
| US6946394B2 | Methods and systems for determining a characteristic of a layer formed on a specimen by a deposition process | Emerging Cross-Sectional Technologies | 28 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.