Inventor · Portland, OR, US

Daniel A. Koos

11Patents

10h-index

10Co-inventors

65Inventor score

Filing activity: Jan 6, 1994 → May 26, 2011

Most-cited inventions

Patent	Title	Area	Cited by	Status
US5413941A	Optical end point detection methods in semiconductor planarizing polishing processes	Physics	270	Expired
US5934980A	Method of chemical mechanical polishing	Electricity	182	Expired
US6234877A	Method of chemical mechanical polishing	Electricity	118	Expired
US6120354A	Method of chemical mechanical polishing	Electricity	109	Expired
US6099604A	Slurry with chelating agent for chemical-mechanical polishing of a semiconductor wafer and methods related thereto	Electricity	70	Expired
US7338908B1	Method for fabrication of semiconductor interconnect structure with reduced capacitance, leakage current, and improved breakdown voltage	Electricity	36	Expired
US6312486A	Slurry with chelating agent for chemical-mechanical polishing of a semiconductor wafer and methods related thereto	Electricity	25	Expired
US5741547A	Method for depositing a film of titanium nitride	Chemistry; Metallurgy	20	Expired
US7531463B2	Fabrication of semiconductor interconnect structure	Electricity	19	Active
US7972970B2	Fabrication of semiconductor interconnect structure	Electricity	15	Active
US8481432B2	Fabrication of semiconductor interconnect structure	Electricity	4	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.