Daniel E. Sutton
4Patents
2h-index
14Co-inventors
34Inventor score
Filing activity: Oct 31, 2000 → Jan 16, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6440621B1 | Method of detecting film defects using chemical exposure of photoresist films | Physics | 5 | Expired |
| US6649525B1 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Electricity | 3 | Expired |
| US6759179B1 | Methods and systems for controlling resist residue defects at gate layer in a semiconductor device manufacturing process | Electricity | 1 | Expired |
| US6524869B1 | Method and apparatus for detecting ion implant induced defects | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.