Daniel Mateja
3Patents
1h-index
8Co-inventors
27Inventor score
Filing activity: Mar 13, 2013 → Dec 9, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9850402B2 | CMP compositions and methods for selective removal of silicon nitride | Electricity | 1 | Active |
| US9303187B2 | Compositions and methods for CMP of silicon oxide, silicon nitride, and polysilicon materials | Electricity | 1 | Active |
| US8916061B2 | CMP compositions selective for oxide and nitride with high removal rate and low defectivity | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.