Inventor · Radebeul, DE

Daniel Sarlette

3Patents
1h-index
9Co-inventors
37Inventor score

Filing activity: Jul 31, 2001 → Aug 5, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US6645683B2 Control system and methods for photolithographic processes Physics 2 Expired
US9437440B2 Method for manufacturing a semiconductor device Electricity 0 Active
US9837280B2 Methods for manufacturing semiconductor devices Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.