Daniel Stearns
6Patents
2h-index
15Co-inventors
48Inventor score
Filing activity: Aug 7, 1987 → Jul 7, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4870648A | X-ray beamsplitter | Physics | 20 | Expired |
| US8895946B2 | Source-collector modules for EUV lithography employing a GIC mirror and a LPP source | Electricity | 4 | Active |
| US8746975B2 | Thermal management systems, assemblies and methods for grazing incidence collectors for EUV lithography | Physics | 1 | Active |
| US9609731B2 | Systems and methods for synchronous operation of debris-mitigation devices | Electricity | 1 | Active |
| US8731139B2 | Evaporative thermal management of grazing incidence collectors for EUV lithography | Electricity | 0 | Active |
| US9585236B2 | Sn vapor EUV LLP source system for EUV lithography | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.