David W. Benzing
10Patents
7h-index
8Co-inventors
59Inventor score
Filing activity: Dec 26, 1984 → May 15, 2008
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4786352A | Apparatus for in-situ chamber cleaning | Electricity | 174 | Expired |
| US4657616A | In-situ CVD chamber cleaner | Emerging Cross-Sectional Technologies | 78 | Expired |
| US6823815B2 | Wafer area pressure control for plasma confinement | Electricity | 49 | Expired |
| US4572759A | Troide plasma reactor with magnetic enhancement | Electricity | 45 | Expired |
| US6974523B2 | Hollow anode plasma reactor and method | Electricity | 45 | Expired |
| US6492774B1 | Wafer area pressure control for plasma confinement | Electricity | 24 | Expired |
| US8845855B2 | Electrode for plasma processes and method for manufacture and use thereof | Electricity | 21 | Active |
| US7470627B2 | Wafer area pressure control for plasma confinement | Electricity | 4 | Expired |
| US6669253B2 | Wafer boat and boat holder | Emerging Cross-Sectional Technologies | 2 | Expired |
| US8465620B2 | Hollow anode plasma reactor and method | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.