Denis Rufin
5Patents
4h-index
5Co-inventors
36Inventor score
Filing activity: Jul 11, 1988 → Jun 26, 1989
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5001873A | Method and apparatus for in situ cleaning of excimer laser optics | Electricity | 125 | Expired |
| US4886444A | Process for treating gaseous effluents coming from the manufacture of electronic components and incineration apparatus for carrying out said process | Mechanical Engineering; Lighting; Heating | 21 | Expired |
| US4872944A | Process for the control in real time of the selectivity of the etching by analysis of the plasma gases in a process of reactive ionic etching and a reactor therefore | Electricity | 9 | Expired |
| US5084080A | Device for trapping gaseous compounds of refractory metals and pumping plant including same | Performing Operations; Transporting | 7 | Expired |
| US4981723A | Chemical vapor deposition of tungsten silicide using silicon sub-fluorides | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.