Dmitry Shur
12Patents
3h-index
13Co-inventors
53Inventor score
Filing activity: May 9, 2003 → May 6, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9214317B2 | System and method of SEM overlay metrology | Electricity | 13 | Active |
| US7473911B2 | Specimen current mapper | Electricity | 6 | Expired |
| US7038224B2 | Contact opening metrology | Electricity | 6 | Expired |
| US7602197B2 | High current electron beam inspection | Physics | 3 | Expired |
| US7279689B2 | Contact opening metrology | Electricity | 3 | Expired |
| US8546756B2 | System and method for material analysis of a microscopic element | Electricity | 2 | Active |
| US7476875B2 | Contact opening metrology | Electricity | 1 | Active |
| US11031210B2 | Charged particle detection system | Electricity | 1 | Active |
| US10910193B2 | Particle detection assembly, system and method | Electricity | 0 | Active |
| US11322333B2 | Charged particle detection system | Electricity | 0 | Active |
| US7381978B2 | Contact opening metrology | Electricity | 0 | Expired |
| US9442369B1 | Method and apparatus for lithographic mask production | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.