Efim Entin
6Patents
4h-index
9Co-inventors
42Inventor score
Filing activity: Mar 7, 2002 → Dec 20, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6999836B2 | Method, system, and medium for handling misrepresentative metrology data within an advanced process control system | Physics | 39 | Expired |
| US7272459B2 | Method, system and medium for controlling manufacture process having multivariate input parameters | Emerging Cross-Sectional Technologies | 28 | Expired |
| US6678668B2 | System and method for complex process optimization and control | Physics | 20 | Expired |
| US7966087B2 | Method, system and medium for controlling manufacture process having multivariate input parameters | Emerging Cross-Sectional Technologies | 6 | Active |
| US7668702B2 | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data | Physics | 3 | Expired |
| US7970588B2 | Method, system and medium for controlling manufacturing process using adaptive models based on empirical data | Physics | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.