Method, system and medium for controlling manufacturing process using adaptive models based on empirical data

US7970588B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Yuri Kokotov · 'Anata, IL
• Alexander T. Schwarm · Austin, US
• Efim Entin · Jerusalem, IL
• Jacques Seror · Jerusalem, IL
• Jehuda Hartman · Rehovot, IL
• Yossi Fisher · Jerusalem, IL
• Arulkumar Shanmugasundram · Sunnyvale, US
• Moshe Sarfaty · Cupertino, US

Key dates

• Filing date: Dec 20, 2007
• Grant date: Jun 28, 2011
• Expiry date: Sep 2, 2029

Classification

• Technology area (CPC G): Physics
• CPC primary: G05B17/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. The method includes the steps of identifying one or more input parameters that cause a change in output characteristics, defining global nodes using estimated maximum and minimum values of the input parameters, and defining a mathematical equation that calculates a predicted output characteristic for each node. The method also includes the steps of receiving at least one empirical data point having one or more input parameter values and at least one empirical output value and adjusting the predicted output values at the nodes based on a difference between the at least one empirical output value and the predicted output characteristic calculated using the mathematical equation based on the one or more input parameter values.