Method, system and medium for controlling manufacture process having multivariate input parameters

US7966087B2 · kind B2 · utility

Assignee

• Applied Materials, Inc. · US

Inventors

• Yuri Kokotov · 'Anata, IL
• Efim Entin · Jerusalem, IL
• Jacques Seror · Jerusalem, IL
• Yossi Fisher · Jerusalem, IL
• Shalomo Sarel · Givatayim, IL
• Arulkumar Shanmugasundram · Sunnyvale, US
• Alexander T. Schwarm · Austin, US
• Young Jeen Paik · Campbell, US

Key dates

• Filing date: Jul 31, 2007
• Grant date: Jun 21, 2011
• Expiry date: Sep 21, 2028

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y02P90/02
• WIPO field: Control
• WIPO sector: Instruments

Abstract

A method, system, and medium of modeling and/or for controlling a manufacturing process is disclosed. In particular, a method according to embodiments of the present invention includes calculating a set of predicted output values, and obtaining a prediction model based on a set of input parameters, the set of predicted output values, and empirical output values. Each input parameter causes a change in at least two outputs. The method also includes optimizing the prediction model by minimizing differences between the set of predicted output values and the empirical output values, and adjusting the set of input parameters to obtain a set of desired output values to control the manufacturing apparatus. Obtaining the prediction model includes transforming the set of input parameters into transformed input values using a transformation function of multiple coefficient values, and calculating the predicted output values using the transformed input values.