Eiichiro Okamoto
6Patents
1h-index
6Co-inventors
33Inventor score
Filing activity: Oct 17, 2013 → Jan 25, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9536761B2 | Substrate liquid processing apparatus | Electricity | 3 | Active |
| US10713772B2 | Measurement processing device, substrate processing system, measurement jig, measurement processing method, and storage medium | Physics | 0 | Active |
| US9793142B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US9895711B2 | Substrate liquid processing apparatus, substrate liquid processing method and substrate processing apparatus | Performing Operations; Transporting | 0 | Active |
| US9782807B2 | Substrate processing system, method for controlling substrate processing system, and storage medium | Electricity | 0 | Active |
| US9818626B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.