Elham Mohimi
8Patents
2h-index
21Co-inventors
43Inventor score
Filing activity: Nov 10, 2015 → Jul 29, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10103057B2 | Use of an inhibitor molecule in chemical vapor deposition to afford deposition of copper on a metal substrate with no deposition on adjacent SIO2 substrate | Electricity | 4 | Active |
| US10566194B2 | Selective deposition of etch-stop layer for enhanced patterning | Electricity | 2 | Active |
| US11584986B1 | Area selective CVD of metallic films using precursor gases and inhibitors | Electricity | 2 | Active |
| US10472716B1 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Electricity | 2 | Active |
| US10643889B2 | Pre-treatment method to improve selectivity in a selective deposition process | Electricity | 2 | Active |
| US11094542B2 | Selective deposition of etch-stop layer for enhanced patterning | Electricity | 1 | Active |
| US11869770B2 | Selective deposition of etch-stop layer for enhanced patterning | Electricity | 0 | Active |
| US10745806B2 | Showerhead with air-gapped plenums and overhead isolation gas distributor | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.