Inventor · Los Altos, CA, US

Esther Jeng

10Patents

8h-index

6Co-inventors

61Inventor score

Filing activity: Jun 28, 2012 → Oct 8, 2021

Most-cited inventions

Patent	Title	Area	Cited by	Status
US9240347B2	Tungsten feature fill	Electricity	59	Active
US9653353B2	Tungsten feature fill	Electricity	46	Active
US10103058B2	Tungsten feature fill	Electricity	22	Active
US10256142B2	Tungsten feature fill with nucleation inhibition	Electricity	21	Active
US8883637B2	Systems and methods for controlling etch selectivity of various materials	Electricity	20	Active
US9997405B2	Feature fill with nucleation inhibition	Electricity	18	Active
US10580695B2	Feature fill with nucleation inhibition	Electricity	12	Active
US11075115B2	Tungsten feature fill	Electricity	10	Active
US11410883B2	Tungsten feature fill with nucleation inhibition	Electricity	4	Active
US11901227B2	Feature fill with nucleation inhibition	Electricity	2	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.