Eva Mondt
11Patents
3h-index
37Co-inventors
56Inventor score
Filing activity: Feb 21, 2007 → May 8, 2017
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8634053B2 | Lithographic apparatus and device manufacturing method | Physics | 11 | Active |
| US8274641B2 | Substrate table, lithographic apparatus and device manufacturing method | Physics | 3 | Active |
| US8634052B2 | Lithographic apparatus and method involving a ring to cover a gap between a substrate and a substrate table | Physics | 3 | Active |
| US9242194B2 | Device for purifying a fluid | Performing Operations; Transporting | 2 | Active |
| US8614424B2 | Device comprising means for guiding fluid from an inlet to an outlet | Chemistry; Metallurgy | 1 | Active |
| US9040938B2 | Device comprising a source for emitting ultraviolet light | Chemistry; Metallurgy | 1 | Active |
| US10268127B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Active |
| US7692765B2 | Lithographic apparatus and method of removing liquid | Physics | 0 | Active |
| US8675172B2 | Lithographic apparatus and method of removing liquid | Physics | 0 | Active |
| US9645506B2 | Lithographic apparatus and device manufacturing method | Physics | 0 | Active |
| US8416383B2 | Lithographic apparatus and method | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.