Greg Sexton
10Patents
4h-index
9Co-inventors
49Inventor score
Filing activity: Dec 22, 1999 → Jul 2, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6669783B2 | High temperature electrostatic chuck | Electricity | 63 | Expired |
| US6646857B2 | Semiconductor wafer lifting device and methods for implementing the same | Emerging Cross-Sectional Technologies | 32 | Expired |
| US6377437B1 | High temperature electrostatic chuck | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6567258B2 | High temperature electrostatic chuck | Emerging Cross-Sectional Technologies | 11 | Expired |
| US8137501B2 | Bevel clean device | Electricity | 3 | Active |
| US8826857B2 | Plasma processing assemblies including hinge assemblies | Electricity | 2 | Active |
| US8475624B2 | Method and system for distributing gas for a bevel edge etcher | Emerging Cross-Sectional Technologies | 2 | Active |
| US8328980B2 | Apparatus and methods for enhanced fluid delivery on bevel etch applications | Emerging Cross-Sectional Technologies | 2 | Active |
| US8671965B2 | Methods for enhanced fluid delivery on bevel etch applications | Emerging Cross-Sectional Technologies | 0 | Active |
| US8940098B2 | Method for distributing gas for a bevel etcher | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.