Inventor · Campbell, CA, US

Harry Kirk

11Patents
8h-index
9Co-inventors
57Inventor score

Filing activity: Oct 4, 2002 → Dec 1, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US7427554B2 Manufacturing strained silicon substrates using a backing material Electricity 33 Active
US7479441B2 Method and apparatus for flag-less water bonding tool Electricity 33 Active
US7094666B2 Method and system for fabricating strained layers for the manufacture of integrated circuits Electricity 28 Expired
US7772088B2 Method for manufacturing devices on a multi-layered substrate utilizing a stiffening backing substrate Electricity 26 Active
US7598153B2 Method and structure for fabricating bonded substrate structures using thermal processing to remove oxygen species Electricity 23 Active
US7391047B2 System for forming a strained layer of semiconductor material Electricity 14 Expired
US8241996B2 Substrate stiffness method and resulting devices for layer transfer process Electricity 12 Active
US7595499B2 Method and system for fabricating strained layers for the manufacture of integrated circuits Electricity 10 Active
US8187377B2 Non-contact etch annealing of strained layers Electricity 3 Active
US7811901B1 Method and edge region structure using co-implanted particles for layer transfer processes Electricity 1 Active
US7910456B1 Liquid based substrate method and structure for layer transfer applications Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.