Haruko Ohno
3Patents
3h-index
4Co-inventors
36Inventor score
Filing activity: Oct 6, 2000 → Mar 19, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6558478B1 | Method of and apparatus for cleaning substrate | Emerging Cross-Sectional Technologies | 26 | Expired |
| US6745784B2 | Method of and apparatus for cleaning substrate | Emerging Cross-Sectional Technologies | 6 | Expired |
| US6776919B2 | Method and apparatus for etching ruthenium films | Electricity | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.