Inventor · Tsukuba, JP

Hideaki Seto

8Patents
3h-index
12Co-inventors
46Inventor score

Filing activity: Aug 18, 1998 → Apr 11, 2006

Most-cited inventions

PatentTitleAreaCited byStatus
US7056392B1 Wafer chucking apparatus and method for spin processor Electricity 6 Expired
US6032529A Liquid level sensor for buffered hydrofluoric acid Physics 5 Expired
US6299723A Anti-airlock apparatus for filters Performing Operations; Transporting 3 Expired
US6248180A Method for removing particles from a semiconductor wafer Emerging Cross-Sectional Technologies 3 Expired
US5998322A Filter medium for molten metals Chemistry; Metallurgy 3 Expired
US6276379A Anti-microbubble deposition apparatus Emerging Cross-Sectional Technologies 2 Expired
US7371659B1 Substrate laser marking Electricity 1 Expired
US7201176B2 Wafer chucking apparatus for spin processor Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.