Hideki Nasuno
13Patents
10h-index
24Co-inventors
72Inventor score
Filing activity: Mar 15, 1995 → Feb 25, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5528048A | Charged particle beam exposure system and method | Electricity | 26 | Expired |
| US5614725A | Charged particle beam exposure system and method | Electricity | 23 | Expired |
| US6646275B2 | Charged particle beam exposure system and method | Electricity | 22 | Expired |
| US6242751A | Charged-particle-beam exposure device and charged-particle-beam exposure method | Electricity | 20 | Expired |
| US5977548A | Charged particle beam exposure system and method | Electricity | 17 | Expired |
| US6118129A | Method and system for exposing an exposure pattern on an object by a charged particle beam which is shaped into a plurality of beam elements | Electricity | 16 | Expired |
| US5757015A | Charged-particle-beam exposure device and charged-particle-beam exposure method | Electricity | 15 | Expired |
| US5969365A | Charged-particle-beam exposure device and charged-particle-beam exposure method | Electricity | 13 | Expired |
| US6486479B1 | Charged particle beam exposure system and method | Electricity | 12 | Expired |
| US5920077A | Charged particle beam exposure system | Electricity | 10 | Expired |
| US6784426B2 | Electron beam irradiation apparatus, electron beam exposure apparatus, and defect detection method | Electricity | 0 | Expired |
| US9859099B2 | Exposure apparatus and exposure method | Electricity | 0 | Active |
| US8779378B2 | Electron beam detector, electron beam processing apparatus, and method of manufacturing electron beam detector | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.