Hiroho Kitada
5Patents
2h-index
17Co-inventors
44Inventor score
Filing activity: Feb 26, 2009 → Dec 24, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8897906B2 | Wafer processing based on sensor detection and system learning | Emerging Cross-Sectional Technologies | 5 | Active |
| US8828257B2 | Plasma processing apparatus and operation method thereof | Electricity | 4 | Active |
| US8569177B2 | Plasma processing apparatus and plasma processing method | Electricity | 2 | Active |
| US11482435B2 | Plasma processing apparatus | Electricity | 0 | Active |
| US11955360B2 | Electrostatic chuck and processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.