Hironobu Hyakutake
15Patents
3h-index
18Co-inventors
57Inventor score
Filing activity: Apr 15, 1999 → Dec 15, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6203627A | Cleaning method | Electricity | 7 | Expired |
| US6293288A | Cleaning method and apparatus | Electricity | 3 | Expired |
| US9027573B2 | Substrate processing apparatus for maintaining a more uniform temperature during substrate processing | Electricity | 3 | Active |
| US11232959B2 | Substrate processing apparatus and substrate processing meihod | Electricity | 2 | Active |
| US11075096B2 | Substrate processing apparatus | Electricity | 1 | Active |
| US10840081B2 | Liquid processing apparatus, liquid processing method, and storage medium | Electricity | 1 | Active |
| US8685169B2 | Substrate processing apparatus, substrate processing method and storage medium | Electricity | 0 | Active |
| US8577502B2 | Liquid processing apparatus, liquid processing method, computer program, and storage medium | Emerging Cross-Sectional Technologies | 0 | Active |
| US10928732B2 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Electricity | 0 | Active |
| US11915947B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US10458010B2 | Substrate liquid processing apparatus, substrate liquid processing method, and storage medium | Electricity | 0 | Active |
| US11087992B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US10916456B2 | Substrate liquid processing apparatus and substrate liquid processing method | Electricity | 0 | Active |
| US8882961B2 | Substrate treatment apparatus | Electricity | 0 | Active |
| US8778092B2 | Substrate processing apparatus, substrate processing method and storage medium | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.